Full Name | ATC-1800F Sputtering System |
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Category | Other |
Description | System uses 5 sources that can mount multilayer materials using a vacuum system that can reach 10-8 torr in pressure. Commonly used with cobalt, Iron and other superconducting elements. |
Location | HSCI-233 |
Contacts | Primary:
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Cost of Operation | |
Training Needed | Please contact Dr. Jiyeong Gu for specific training. |
Manufacturer | AJA Systems International |